Line Valves

These valves have fluorocarbon O-ring seals with integrated bellows as a shaft, also have a leakage rate of 2×10-9 mbar.L/s withstanding atmospheric pressures up to 1×10-9 Torr in high vacuum (HV), with stainless steel body.
Recommended for applications where a line connection between 2 displacement ports is required. Available for manual and pneumatic operation.

Main application:

• Semiconductor manufacturing
• Plasma physics research
• Nuclear accelerators