RF Generators

GHW series RF power generators offer maximum nominal output powers of 1250, 2500 and 5000 watts at a frequency of 13.56 MHz.

Models are available:

• KEINOS RF plasma generators ™ 2 MHz, 5 kW, 11 kW and 13 kW
  
• NOVA® 2 MHz RF plasma generators
  
• Elite RF plasma generators ™ 13.56 MHz
  
• GHW Series 13.56 MHz, 1.25, 2.5 and 5.0 kW High Reliability RF Plasma Generators
  
• Optional automatic frequency tuning allows fixed matching networks for faster tuning Excellent reliability for increased uptime and lower cost of ownership Automatic load shedding protection protects against over-dissipation of adverse loads Unlimited load impedance range for stable power at any load